Ryosuke Iwamoto

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:00 PM - 7:45 PM Z12 (Z12)

Oral presentation
| 8 Plasma Electronics
| 8.8 Division of Plasma Electronics 30th Anniversary Special Session

[16p-Z12-1~17] 8.8 Division of Plasma Electronics 30th Anniversary Special Session

5:00 PM - 5:15 PM

[16p-Z12-8] Control of a-C:H Film Properties by Tailored Waveform Excited PECVD

〇(M2)Ryosuke Iwamoto¹, Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹, Takahiro Shindo³, Satoshi Tanaka³, Tatsuo Matsudo³ (1.Kyushu Univ., 2.NINS, 3.TEL)

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