Kenta Nakazawa

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 5:15 PM Z15 (Z15)

Oral presentation
| 6 Thin Films and Surfaces
| 6.6 Probe Microscopy

[16p-Z15-1~13] 6.6 Probe Microscopy

4:30 PM - 4:45 PM

[16p-Z15-11] Scanning nanopipette probe microscope capable of irradiating local atmospheric pressure inductively coupled plasma for surface fine etching

Syun Toda¹, 〇Kenta Nakazawa¹, Akihisa Ogino¹, Masaru Shimomura¹, Futoshi Iwata^1,2 (1.Shizuoka Univ., 2.Shizuoka Univ. RIE)