Mohit Mohit

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 5:30 PM Z26 (Z26)

Oral presentation
| CS Code-sharing session
| 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[16p-Z26-1~15] CS.5 Code-sharing Session of 6.1 & 13.3 & 13.5

4:45 PM - 5:00 PM

▼ [16p-Z26-13] Fabrication of ferroelectric gate thin film transistors using CSD Y-HZO and sputtered HZO with sputtered ITO channel

〇(DC)Mohit Mohit¹, Shinji Migita², Hiroyuki Ota², Yukinori Morita², Eisuke Tokumitsu¹ (1.JAIST, 2.AIST)