Yuki Fujiwara

→ Search for Yuki Fujiwara in Google Scholar

Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 5:30 PM Z26 (Z26)

Oral presentation
| CS Code-sharing session
| 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[16p-Z26-1~15] CS.5 Code-sharing Session of 6.1 & 13.3 & 13.5

5:15 PM - 5:30 PM

[16p-Z26-15] Physical properties of mist CVD-derived HZO films dependent on post deposition annealing by RTA

〇(M1)Yuki Fujiwara¹, Onishi Junya¹, Hiroyuki Nishinaka¹, Masahiro Yoshimoto¹, Minoru Noda¹ (1.Kyoto Inst. Tech.)