Kento Tahara

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 5:30 PM Z26 (Z26)

Oral presentation
| CS Code-sharing session
| 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[16p-Z26-1~15] CS.5 Code-sharing Session of 6.1 & 13.3 & 13.5

2:30 PM - 2:45 PM

△ [16p-Z26-5] Compatibility of thinning and low temperature process for ferroelectric Hf_0.5Zr_0.5O₂ films

〇Kento Tahara¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. Tokyo)