Kazuki Yoshida

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 5:00 PM Z29 (Z29)

Oral presentation
| 16 Amorphous and Microcrystalline Materials
| 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[16p-Z29-1~13] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

1:30 PM - 1:45 PM

[16p-Z29-1] Elemental Reactions of Nb₂O₅ RT-ALD Explained by Quartz Crystal Microbalance Measurements

〇(DC)Kazuki Yoshida^1,2, Kentaro Saito^1,2, Masanori Miura³, Kensaku Kanomata³, Fumihiko Hirose¹ (1.Yamagata Univ., 2.JSPS Research Fellow, 3.ROEL Yamagata Univ.)