Tomohiro Kuyama

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 9:00 AM - 11:45 AM Z03 (Z03)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-Z03-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:00 AM - 9:15 AM

△ [17a-Z03-1] Admittance Analysis of Plasma-induced Defects in SiN Films Introduced by Plasma Exposure Using a Distributed Bulk-dielectric Trap Model

〇Tomohiro Kuyama^1,2, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ., 2.JSPS Research Fellow)