Moritaka Nakamura

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 9:00 AM - 11:45 AM Z03 (Z03)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-Z03-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:15 AM - 11:45 AM

[17a-Z03-10] [INVITED] Development of the world's first mass production Al etcher and electrostatic chuck

〇Moritaka Nakamura¹ (1.MAMO)