Kazuhiro Kanda

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 10:00 AM - 11:45 AM Z15 (Z15)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[17a-Z15-1~7] 6.2 Carbon-based thin films

10:00 AM - 10:15 AM

[17a-Z15-1] Change of free volume in hydrogenated DLC film by the irradiation of soft X-rays

〇Kazuhiro Kanda¹, Tatsuya Tamura¹, Hiroki Akasaka², Fuminobu Hori³, Atsushi Yabuuchi⁴, Atsushi Kinomura⁴ (1.LASTI, Univ. Hyogo, 2.Tokyo Inst. Tech., 3.Eng., Osaka Pref. Univ., 4.KURNS, Kyoto Univ.)

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