Toru Harigai

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 10:00 AM - 11:45 AM Z15 (Z15)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[17a-Z15-1~7] 6.2 Carbon-based thin films

10:45 AM - 11:00 AM

[17a-Z15-4] Fabrication of Hydrogen-Free DLC Films Using RF Plasma CVD Method with He/CO Mixied Gas

〇Toru Harigai¹, Hikaru Ohhra¹, Ryoya Tominaga¹, Hirofumi Takikawa¹, Kohtaku Suzuki², Shinsuke Kunitsugu³ (1.Toyohashi Univ. Technol., 2.Wakasa Wan Energy Res. Cent., 3.Ind. Technol. Cent. Okayama Pref.)

Fri. Mar 19, 2021 9:00 AM - 9:50 AM P02 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[19a-P02-1~9] 8 Plasma Electronics(Poster)

9:00 AM - 9:50 AM

[19a-P02-9] Development of Pulse-Arc-Plasma-Jet Source with Coaxial Gas Line for DLC High-Rate Deposition

〇Toru Harigai¹, Ryoya Tominaga¹, Hikaru Ohhra¹, Hirofumi Takikawa¹, Kohtaku Suzuki², Shinsuke Kunitsugu³, Hidenobu Gonda⁴ (1.Toyohashi Univ. Technol., 2.Wakasa Wan Energy Res. Cent., 3.Ind. Technol. Cent. Okayama Pref., 4.OSG Coat. Service)

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