10:00 〜 10:15 ▲ [17a-Z21-5] Modeling of Current-Voltage Characteristics of DC Reactive Sputtering and Its Application to Superconducting NbTiN Thin Film Deposition 〇Wenlei Shan1、Shohei Ezaki1、Akihira Miyachi1、Tomonori Tamura1 (1.NAOJ)