10:00 AM - 10:15 AM ▲ [17a-Z21-5] Modeling of Current-Voltage Characteristics of DC Reactive Sputtering and Its Application to Superconducting NbTiN Thin Film Deposition 〇Wenlei Shan1, Shohei Ezaki1, Akihira Miyachi1, Tomonori Tamura1 (1.NAOJ)