Marika Ohta

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 3:00 PM - 3:50 PM P06 (Poster)

Poster presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[17p-P06-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

3:00 PM - 3:50 PM

[17p-P06-3] Allooy composition control of α-(AlGa)₂O₃ thin films and Al desorption phenomena in mist CVD

〇Marika Ohta¹, ichiro tanaka¹, kazuyuki uno¹ (1.Wakayama Univ.)