Kazuki Watanabe

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 3:00 PM - 3:50 PM P06 (Poster)

Poster presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[17p-P06-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

3:00 PM - 3:50 PM

[17p-P06-4] Solid-phase crystallization of β-Ga₂O₃ thin films with various dopants
by Excimer Laser Annealing

〇(M1)Kazuki Watanabe¹, Takumi Matsushima¹, Tomoaki Oga¹, Nobuo Tsuchimine², Satoru Kaneko^3,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.TOSHIMA Manu., 3.KISTEC)