Tetsuya Tatsumi

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 5:40 PM Z03 (Z03)

Symposium (Oral)
| Symposium
| Next Giant Leap with Plasma Electronics in New Normal Era

[17p-Z03-1~10] Next Giant Leap with Plasma Electronics in New Normal Era

3:45 PM - 4:15 PM

[17p-Z03-7] Past and future of plasma processes

〇Tetsuya Tatsumi¹ (1.Sony Semiconductor Solutions Corp.)