jun sekimoto

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 3:45 PM Z13 (Z13)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.6 Ultrasonics

[17p-Z13-1~8] 1.6 Ultrasonics

1:30 PM - 1:45 PM

△ [17p-Z13-1] Two layered polarity inverted SiAlN/AlN film bulk acoustic wave resonator

〇(B)jun sekimoto¹, masashi suzuki¹, shoji kakio¹ (1.Univ. Yamanashi)