Kentaro Kojima

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 3:30 PM Z16 (Z16)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[17p-Z16-1~8] 7.2 Applications and technologies of electron beams

3:15 PM - 3:30 PM

△ [17p-Z16-8] INVESTIGATION OF NON-CHARGING EXPOSURE CONDITIONS FOR INSULATING RESIST FILMS IN ELECTRON BEAM LITHOGRAPHY

〇(M1)Kentaro Kojima¹, Kento Kubo¹, Yoshinobu Kono¹, Masatoshi Kotera¹ (1.OIT)