Kei Sumita

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17p-Z26-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:30 PM - 4:45 PM

[17p-Z26-10] Proposal of subband engineering in InAs-OI nMOSFETs by channel thickness scaling of (111)-oriented channel and fabrication of UTB (111) InAs-OI substrates

〇(DC)Kei Sumita¹, Ryohei Yoshizu², Kasidit Toprasertpong^1,2, Mitsuru Takenaka^1,2, Shinichi Takagi^1,2 (1.Univ. Tokyo, 2.Univ. Tokyo Fac. of Eng.)

4:45 PM - 5:00 PM

[17p-Z26-11] Experimental demonstration of mobility enhancement by channel thickness scaling and evaluation of interface traps inside the conduction band in (111) InAs-OI nMOSFET

〇(DC)Kei Sumita¹, Ryohei Yoshizu², Kasidit Toprasertpong^1,2, Mitsuru Takenaka^1,2, Shinichi Takagi^1,2 (1.Univ. Tokyo, 2.Univ. Tokyo Fac. of Eng.)