Ryosuke Okuyama

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17p-Z26-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

1:45 PM - 2:15 PM

[17p-Z26-2] [The 12th Silicon Technology Division Paper Award Speech] Reaction Kinetic Analysis of Desorption Behavior of Hydrogen in Projection Range of Multi-Element Molecular Ion Implanted Epitaxial Wafer for Advanced CMOS image sensors

〇Ryosuke Okuyama¹, Ayumi Masada¹, Satoshi Shigematsu¹, Ryo Hirose¹, Takeshi Kadono¹, Yoshihiro Koga¹, Hidehiko Okuda¹, Kazunari Kurita¹ (1.SUMCO)