Hirokazu Fujiwara

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17p-Z26-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

3:15 PM - 3:30 PM

[17p-Z26-6] [Young Scientist Presentation Award Speech] Demonstration of Surrounding Gate Vertical-Channel FET with Gate Length of 40 nm Using BEOL Process Compatible In-Al-Zn Oxide Channel

〇Hirokazu Fujiwara¹, Yuta Sato¹, Nobuyoshi Saito¹, Tomomasa Ueda¹, Keiji Ikeda¹ (1.Kioxia Corp.)