Tatsuro Maeda

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17p-Z26-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:00 PM - 4:15 PM

[17p-Z26-8] Si/Ge heterogenous complementary FET (hCFET) through layer transfer technology

〇Tatsuro Maeda¹, Hiroyuki Ishii¹, Toshifumi Irisawa¹, T.-Z. Hong², P.-J. Sung², Y.-J. Lee², W. H. Chang¹ (1.AIST, 2.TSRI)