Koichi Takeuchi

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17p-Z26-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:15 PM - 4:30 PM

△ [17p-Z26-9] Direct imaging of crystallographic tilting in isotopically controlled ²⁸Si/SiGe substrate

〇Koichi Takeuchi¹, Satoru Miyamoto^1,2, Kohei Itoh², Noritaka Usami¹ (1.Nagoya Univ., 2.Keio Univ.)