Takuma Yasunami

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z05 (Z05)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[18a-Z05-1~11] 15.6 Group IV Compound Semiconductors (SiC)

10:45 AM - 11:00 AM

[18a-Z05-7] Crystallinity and contact resistance of n-type 4H-SiC formed by thin-film laser doping with KrF excimer laser

〇Takuma Yasunami¹, Toshihumi kikuchi^2,3, Kaname imokawa³, Daisuke Nakamura², Hiroshi Ikenoue^2,3 (1.Kyushu Univ., 2.ISEE. Kyushu Univ., 3.Gigaphoton Next GLP)

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