Nozomi Tanaka

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:15 PM Z14 (Z14)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[18a-Z14-1~11] 7.1 X-ray technologies

9:15 AM - 9:30 AM

▲ [18a-Z14-2] Cleaning of tin layer on EUV multilayer mirrors by the EUV induced hydrogen plasma

〇Nozomi Tanaka¹, Baojun Zhu¹, Chang Liu¹, Katsunobu Nishihara¹, Shinsuke Fujioka¹, Kyung Sik Kang², Youngduk Suh², Jeong-Gil Kim², Ken Ozawa³, Minoru Kubo³ (1.ILE Osaka Univ., 2.Samsung MRD Center, 3.Samsung R&D Inst.)

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