CHANG LIU

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:15 PM Z14 (Z14)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[18a-Z14-1~11] 7.1 X-ray technologies

9:30 AM - 9:45 AM

▼ [18a-Z14-3] Optical Emission Spectroscopy (OES) measurement of EUV-induced plasma parameters in hydrogen

〇(D)CHANG LIU¹, NOZOMI TANAKA¹, BAOJUN ZHU¹, KATSUNOBU NISHIHARA¹, SHINSUKE FUJIOKA¹, KYUNGSIK KANG², YOUNGDUK SUH², JEONGGIL KIM², KEN OZAWA³, MINORU KUBO³ (1.Osaka Univ., 2.Samsung MRD Center, 3.Samsung R&D Inst.)

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