Akira Sasaki

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:15 PM Z14 (Z14)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[18a-Z14-1~11] 7.1 X-ray technologies

10:00 AM - 10:15 AM

[18a-Z14-5] The origin of the EUV spectrum of Sn and heavier and elements, which is applicable to the lithographic sources

〇Akira Sasaki¹ (1.KPSI, QST)