Yuichi Shibata

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:15 AM - 12:00 PM Z15 (Z15)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18a-Z15-1~10] 13.7 Compound and power electron devices and process technology

11:45 AM - 12:00 PM

[18a-Z15-10] Electron traps formed by oxygen ion implantation in n-type GaN

〇(M1)Yuichi Shibata¹, Masahiro Horita^1,2, Ryo Tanaka³, Shinya Takashima³, Katsunori Ueno³, Jun Suda^1,2 (1.Nagoya Univ., 2.Nagoya Univ. IMaSS, 3.Fuji Electric)

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