Yoshihiko Hirai

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 11:15 AM Z16 (Z16)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[18a-Z16-1~8] 7.3 Micro/Nano patterning and fabrication

10:15 AM - 10:30 AM

[18a-Z16-5] Study on process and martial design for nanoimprint lithography based on deep learning systems

Sou Tsukamoto¹, Kai Kameyama¹, Hideki Tanabe¹, Ryuhei Yamamura¹, Hiroaki Kawata¹, Masaaki Yasuda¹, 〇Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)