Chiaki Miyajima

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 11:15 AM Z16 (Z16)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[18a-Z16-1~8] 7.3 Micro/Nano patterning and fabrication

11:00 AM - 11:15 AM

△ [18a-Z16-8] Dry Etching of Photo-Cured Masks for Area Selective Atomic Layer Deposition

〇Chiaki Miyajima¹, Shunya Ito¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)