Shigeyuki Kuboya

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 11:30 AM Z27 (Z27)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[18a-Z27-1~9] 15.4 III-V-group nitride crystals

10:45 AM - 11:00 AM

[18a-Z27-7] Fabrication of AlGaN films by sputtering deposition and face-to-face annealing

〇Shigeyuki Kuboya¹, Sho Iwayama², Kenjiro Uesugi¹, Kanako Shojiki³, Kenji Norimatsu¹, Hideto Miyake^2,3 (1.SPORR, Mie Univ., 2.Grad. Sch. of RIS, Mie Univ., 3.Grad. Sch. of Eng., Mie Univ.)

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