Kota Yamazaki

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:30 AM - 12:00 PM Z31 (Z31)

Oral presentation
| 17 Nanocarbon Technology
| 17.3 Layered materials

[18a-Z31-1~9] 17.3 Layered materials

10:00 AM - 10:15 AM

[18a-Z31-3] Improvement of the MoS₂ thin film quality deposited by low-temperature MOCVD using Mo precursor i-Pr₂DADMo(CO)₃

〇Kota Yamazaki¹, Yusuke Hibino^1,4, Yusuke Hashimoto¹, Hideaki Machida³, Masato Ishikawa³, Hiroshi Sudoh³, Hitoshi Wakabayashi², Atushi Ogura^1,5 (1.Meiji Univ., 2.Tokyo tech., 3.Gas-phase Growth Ltd., 4.JPSP Research Fellow, 5.MREL)