Mitsunori Toyoda

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 2:30 PM - 6:35 PM Z03 (Z03)

Symposium (Oral)
| Symposium
| Progresses and future on EUV and soft x-ray imaging techniques

[18p-Z03-1~10] Progresses and future on EUV and soft x-ray imaging techniques

5:20 PM - 5:35 PM

[18p-Z03-8] Lab-scale EUV Microscope for Stain-Free Visualization of Higher-Order Structures on Polymer Materials

〇Mitsunori Toyoda^1,2, Yukifumi Momono², Toshiyuki Kakudate², Jun Chen¹ (1.Tokyo Polytechnic Univ., 2.IMRAM, Tohoku Univ.)