Keita Tachiki

→ Search for Keita Tachiki in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 6:00 PM Z05 (Z05)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[18p-Z05-1~16] 15.6 Group IV Compound Semiconductors (SiC)

2:15 PM - 2:30 PM

[18p-Z05-4] [Young Scientist Presentation Award Speech] Formation of high-quality 4H-SiC/SiO₂ interface by
H₂ etching prior to SiO₂ deposition and interface nitridation

〇Keita Tachiki¹, Mitsuaki Kaneko¹, Takuma Kobayashi¹, Tsunenobu Kimoto¹ (1.Kyoto Univ.)