Shota Kato

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[18p-Z17-1~20] 8.1 Plasma production and diagnostics

3:00 PM - 3:15 PM

△ [18p-Z17-7] In-situ measurement of Deposited Film Thickness and Electron density with Double Curling Probes

〇(B)Shota Kato¹, Daisuke Ogawa¹, Keiji Nakamura¹ (1.Chubu Univ.)