Keiji Sakurai

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[18p-Z17-1~20] 8.1 Plasma production and diagnostics

3:30 PM - 3:45 PM

[18p-Z17-8] Wireless communication of in-situ measurement data by color sensor in plasma reactor

〇Keiji Sakurai¹, Takayuki Kitagawa², Shigeyuki Miyagi¹, Kazuyuki Noborio², Koushi Taguchi², Osamu Sakai¹ (1.Univ. Shiga Pref., 2.Sakigake Semicon.)