Yuto Honda

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:15 PM - 4:30 PM

[18p-Z24-11] Measurement system by photogate type fluorescent sensor for identification of Legionella

〇Yuto Honda¹, Yong-Joon Choi¹, Kensuke Murakami¹, Hiromu Ishii¹, Toshihiko Noda¹, Kazuhiro Takahashi¹, Kazuaki Sawada¹, Katsuyuki Machida², Hiroyuki Ito², Mitsumasa Saito³, Yasuhiko Nikaido³ (1.Toyohashi Univ. of Technology, 2.Tokyo Inst of .Technology, 3.Univ. of Occupational and Environmental Health)

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