Boqi Qiu

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:00 PM - 5:15 PM

▲ [18p-Z24-14] Effect of surface step structures on the thermal responsivity of MEMS bolometers

〇(D)Boqi Qiu¹, Ya Zhang², Naomi Nagai¹, Kazuhiko Hirakawa¹ (1.IIS/INQIE, Univ. of Tokyo, 2.TUAT)