Noboru Shimizu

→ Search for Noboru Shimizu in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:15 PM - 2:30 PM

[18p-Z24-4] Study of wet etching for Ge-on-Insulator fabrication by etchback method

〇Noboru Shimizu¹, Keisuke Yamamoto¹, Dong Wang¹, Hiroshi Nakashima² (1.Kyushu Univ., 2.GIC, Kyushu Univ.)