Yusuke Akatsuka

→ Search for Yusuke Akatsuka in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:45 PM - 3:00 PM

[18p-Z24-6] Electrical Characteristics of Atmospheric Pressure Micro-Thermal-Plasma-Jet Crystallized P-type Germanium Film

〇Yusuke Akatsuka¹, Takuma Sato¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)