Hideki Tanabe

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 9:50 AM P01 (Poster)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication(Poster)

[19a-P01-1~5] 7 Beam Technology and Nanofabrication(Poster)

9:00 AM - 9:50 AM

[19a-P01-2] Imprint temperature suppression for thermal nanoimprint lithography

〇Hideki Tanabe¹, Shingo Shimizu¹, Hiroaki Kawata¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)