Atsuki Okawa

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 10:00 AM - 10:50 AM P04 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[19a-P04-1~9] 8 Plasma Electronics(Poster)

10:00 AM - 10:50 AM

[19a-P04-8] Low temperature synthesis and physicochemical characterization of Al₂O₃thin films formed by oxygen plasma irradiation on Al(CH₃)₃condensed layer.

〇(M2)Atsuki Okawa¹, Daichi Yamada², Yohei Otani², Tetsuya Sato¹ (1.Yamanashi Univ., 2.Suwa Univ. of Sci)