Hiroshi Sanda

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 10:00 AM - 12:00 PM Z02 (Z02)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.5 Instrumentation, measurement and Metrology

[19a-Z02-1~8] 1.5 Instrumentation, measurement and Metrology

10:15 AM - 10:30 AM

[19a-Z02-2] Influence of wireless network noise on electrostatic chuck

〇(M1)Hiroshi Sanda^1,2, homma Tetsuya¹ (1.Shibaura-IT, 2.Toshiba Co)