10:15 AM - 10:30 AM
△ [19a-Z17-2] Formation of high-aspect-ratio Si nanocone using intermediate pressure hydrogen plasma
〇Toshimitsu Nomura1, Kenta Kimoto1, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ.)
Fri. Mar 19, 2021 10:00 AM - 12:00 PM Z17 (Z17)
10:15 AM - 10:30 AM
〇Toshimitsu Nomura1, Kenta Kimoto1, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ.)