WENHSIN CHANG

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 12:00 PM Z31 (Z31)

Oral presentation
| 17 Nanocarbon Technology
| 17.3 Layered materials

[19a-Z31-1~11] 17.3 Layered materials

9:15 AM - 9:30 AM

▲ [19a-Z31-2] Top-gate monolayer MoS₂MOSFETs with ZrO₂ gate dielectrics formed by low temperature ALD

〇WENHSIN CHANG¹, Naoya Okada¹, Masayo Horikawa¹, Takahiko Endo², Yasumitsu Miyata², Toshifumi Irisawa¹ (1.AIST, 2.TMU)