Toshiharu Kubo

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 5:00 PM - 5:50 PM P06 (Poster)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[19p-P06-1~9] 13.7 Compound and power electron devices and process technology

5:00 PM - 5:50 PM

[19p-P06-2] Effects of forming gas annealing on electrical properties of Pt/ALD-Al₂O₃/AlGaN/GaN MIS-HEMTsⅢ

〇Toshiharu Kubo¹, Nobuki Yoshida¹, Takashi Egawa¹ (1.Nagoya Inst. of Tech.)