Takayuki Kurashige

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 4:00 PM Z07 (Z07)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[19p-Z07-1~9] 3.7 Laser processing

1:45 PM - 2:00 PM

[19p-Z07-2] Formation of silicon ultra-shallow high-concentration doping layer by laser doping method using a coating film

〇Takayuki Kurashige¹, Akira Mizutani^1,2, Daisuke Nakamura¹, Hiroshi Ikenoue^1,2, Keita Katayama¹ (1.ISEE, Kyushu Univ, 2.Dept. of Gigaphoton Next GLP, Kyushu Univ.)

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