Kohei Miyaji

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 5:15 PM Z13 (Z13)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[19p-Z13-1~14] 6.1 Ferroelectric thin films

2:00 PM - 2:15 PM

[19p-Z13-3] Epitaxial growth of Al_1-xSc_xN thin films on Si substrates using TiN buffer layer

〇Kohei Miyaji¹, Mikio Murase¹, Takeshi Yoshimura¹, Norifumi Fujimura¹ (1.Osaka Pref. Univ.)