Ryo Ebihara

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 5:15 PM Z13 (Z13)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[19p-Z13-1~14] 6.1 Ferroelectric thin films

2:45 PM - 3:00 PM

△ [19p-Z13-6] Fabrication and Characteristics of MEMS Unimorph Cantilever with Y₂O₃-HfO₂ Ferroelectric Thin Film

〇Ryo Ebihara¹, Shinya Yoshida¹, Reijirou Shimura², Hiroshi Funakubo², Shuji Tanaka¹ (1.Tohoku Univ., 2.Tokyo Tech. SMCT)