Takeshi Hamamoto

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 1:45 PM

[19p-Z24-1] Strategy of Device Development of Minimal Fab and Utilization of TCAD Technology

〇Takeshi Hamamoto¹, Kazuhiro Koga¹, Hiroshige Kogayu¹, Junichi Hattori^2,3, Koichi Fukuda^2,3, Khumpuang Sommawan^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.AIDL)

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