Hideyuki Watanabe

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:00 PM - 4:15 PM

[19p-Z24-10] Fabrication and evaluation of diamond SBD using Minimal fab (III)

〇Hideyuki Watanabe¹, Kazumasa Nemoto¹, Noriko Miura², Masashi Kase¹, Takashi Yajima¹, Shuichi Noda¹, Hitoshi Umezawa¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

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