Kazuhiro Koga

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:45 PM - 2:00 PM

[19p-Z24-2] Study of TiN Gate SOI-CMOS process shrink by minimal fab

〇Kazuhiro Koga¹, Y. X. Liu², Fumito Imura^1,2, Masashi Kase², Shuichi Noda², Kazumasa Nemoto², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)

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